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射频反应磁控溅射法制备ZnO:Al透明导电薄膜的光电性能 被引量：1

Microstructure and Optical and Electrical Properties of Al-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering Method
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摘要 室温下采用射频(RF)反应磁控溅射技术在玻璃衬底上沉积具有(002)择优取向的透明导电Al掺杂ZnO(AZO)薄膜。XRD结果表明,制备的AZO薄膜为多晶,具有c轴择优取向。退火处理能提高其结晶度。在Al靶射频功率为40W,ZnO靶射频功率为250W,氩气流量为15mL/min的条件下,获得200nm厚的薄膜电阻率约3.8×10-3?·cm,在可见光范围内有很好的光透过率。 Transparent conductive Al-doped zinc oxide (AZO) films have been deposited on glass substrates at room temperature by the radio frequency (RF) magnetron sputtering method. XRD results show that the obtained films are poly-crystalline with c-axis orientation growth. The crystallinity of AZO thin films can be improved after annealing. The AZO film samples show fine electrical resistivity ~ 3.8×10-3Ω·cm, and exhibit optical transmittance of >80% in the visible range.
作者 徐绍亮 庞晓露 杨会生 张波萍
机构地区 北京科技大学
出处 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2011年第S1期451-454,共4页 Rare Metal Materials and Engineering
基金 国家自然科学基金(50972012) 国家"863"计划项目(2009AA03Z216)
关键词 射频反应磁控溅射 透明导电薄膜 AZO薄膜 光电性能 RF magnetron sputtering transparent conductive oxides AZO thin films optical and electrical properties
分类号 O484.4 [理学—固体物理]
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参考文献11

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共引文献5

同被引文献46

  • 1张丽伟,卢景霄,段启亮,王海燕,李瑞,靳锐敏,王红娟,张宇翔.磁控溅射法制备AZO薄膜的工艺研究[J].电子元件与材料,2005,24(8):46-48. 被引量：15
  • 2陈福,赵恩录,张文玲,苟金芳,曾雄伟.AZO导电薄膜的研究进展及应用[J].玻璃,2007,34(2):13-15. 被引量：3
  • 3Badeker K. Electrical Conductivity and Thermo-Electromotive Force of Some Metallic Ampounds [ J]. Ann Phy, (Leipzip) , 1907, 22(4): 749 -766.
  • 4Cao H T, Pei Z L, Gong J, et al. Transparent Conductive A1 and Mn Doped Zn0 Thin Films Prepared by DC Reactive Magne- tron Sputtering [ J ]. Surface and Coatings Technology, 2004, 184(1): 84 -92.
  • 5Chic J L, Cheng K P, Hsueh Lung H L, et al. Transparent Conducting Sc-Codoped AZO Film Prepared from ZnO : A1-Sc by RF-DC Sputtering [ J]. Thin Solid Films, 2008, 516 ( 16 ) : 5 349-5 354.
  • 6Lin W, Ma R X, Shao W, et aL Structural, Electrical and Optical Properties of Gd Doped and Undoped ZnO: A1 (AZO) Thin Films Prepared by RF Magnetron Sputtering[J]. Applied Surface Science, 2007, 253(11): 5 179-5 183.
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  • 9Jiang M H, Liu X Y. Structural, Electrical and Optical Prop- erties of A1-Ti Codoped ZnO (ATZO)Thin Films Prepared by RF Magnetron Sputtering [J]. Applied Surface Science, 2008, 255(5): 3 175 -3 178.
  • 10Sun Yihua(孙宜华). AZO Transparent Conductive Oxide Tar-get Fabrication of Thin Film(AZO透明导电氧化物靶材及其薄膜制备的研究)[D].Wuhan : Huazhong University of Sci-ence and Technology, 2009.

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稀有金属材料与工程
2011年 第S1期

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