摘要
High-power pulsed magnetron sputtering (HPPMS) technology has drawn extensively attention for producing ultra-high dense plasma and high ionization fractions of the sputtered species,depositing dense films with high performance.CrNx films were deposited on the substrates of Si(100) using high-power pulsed unbalanced magnetron sputtering (HPPUMS) technology,and the analyses of XRD and atomic force microscope (AFM) were conducted on the properties of microstructure and surface morphology of CrNx films;the friction coefficient and the adhesion between CrNx film and substrate were measured,respectively.It was found HPPUMS discharge is able to deposit CrNx films with super comprehensive properties:higher adhesive strength between the film and substrate and lower coefficient of friction.Deposition rate of CrNx films,which was tested by interferometry,was about 4.2nm/min at 0.6Pa and the pulse power density up to 6.8kW/cm2 with the pulse repetition frequency of 0.7Hz,which is about 56% of that provided by the mid-frequency magnetron sputtering discharge under the conditions of the same average power output.However,clusters with a dimension of several hundred nanometers were observed on the AFM morphology probably related to high pulse current.
High-power pulsed magnetron sputtering (HPPMS) technology has drawn extensively attention for producing ultra-high dense plasma and high ionization fractions of the sputtered species,depositing dense films with high performance.CrNx films were deposited on the substrates of Si(100) using high-power pulsed unbalanced magnetron sputtering (HPPUMS) technology,and the analyses of XRD and atomic force microscope (AFM) were conducted on the properties of microstructure and surface morphology of CrNx films;the friction coefficient and the adhesion between CrNx film and substrate were measured,respectively.It was found HPPUMS discharge is able to deposit CrNx films with super comprehensive properties:higher adhesive strength between the film and substrate and lower coefficient of friction.Deposition rate of CrNx films,which was tested by interferometry,was about 4.2nm/min at 0.6Pa and the pulse power density up to 6.8kW/cm2 with the pulse repetition frequency of 0.7Hz,which is about 56% of that provided by the mid-frequency magnetron sputtering discharge under the conditions of the same average power output.However,clusters with a dimension of several hundred nanometers were observed on the AFM morphology probably related to high pulse current.
作者
Mu Xiaodong,Mu Zongxin,Wang Chun,Jia Li,Zang Hirong,Liu Bingbing,Dong Chuang Key Laboratory of Materials Modification by Laser,Ion and Electron Beams (Dalian University of Technology),Ministry of Education,School of Physics and Optoelectronic Technology,Dalian University of Technology,Dalian 116024,China
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2011年第S4期160-163,共4页
Rare Metal Materials and Engineering
基金
Foundation item:the Cultivation Fund of the Key Scientific and Technical Innovation Project,Ministry of Education of China(No707015)
NSFC(50407015)
