摘要
A micro thermal control device with polyimide based micro louver was proposed.The device structure was designed,the actuation voltage was analyzed theoretically and fabrication process was described.The micro louver prototype was fabricated using UV laser micromachining,electrochemistry etch and magnetron sputtering deposition technologies.The main parameters were tested and results were presented.
A micro thermal control device with polyimide based micro louver was proposed.The device structure was designed,the actuation voltage was analyzed theoretically and fabrication process was described.The micro louver prototype was fabricated using UV laser micromachining,electrochemistry etch and magnetron sputtering deposition technologies.The main parameters were tested and results were presented.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2011年第S4期249-251,共3页
Rare Metal Materials and Engineering
