氮分压对离子镀氮化钛涂层的影响

The Effect of Nitrogen Partial Pressure on the Properties of Titanium Nitride Coating by Using Ion Plating Process

研究了氮分压对空心阴极离子镀氮化钛涂层性能的影响。结果表明：在１．３３×１０（－２）～２．２１×１０（－１）Ｐａ氮分庄范围内，显微硬度随氮分区增加而增加，在２×１０（－２）Ｐａ时显微硬度出现最大值，而后随氮分压的增加，显微硬度下降；随着氮分区增加，氨化钛涂层在Ｈ２ＳＯ４溶液中的抗腐蚀性能增加；氮分压强烈影响ＴｉＮ织构。

he effect of nitrogen partial pressure on properties of titanium nitride coating by using hollow cathode discharge ion plating process has been investigated.The result indicates that in a range of 1.33×10(-2)～2. 21×10(-1)Pa, Hv value increases with the increace of nitrogen partial pressure and in about 2×10(-2)Pa,Hv value presents a maximium value,the Hv decreases with the increase of nitrogen partial pressure. Corrosion resistance increases with the increase of nitrogen partial pressure in H2SO4 solution. Nitrogen partial pressure has greatly affected configuration.