摘要
介绍了几种常用泵的原理及在湿法腐蚀清洗设备中的典型应用。
The principle of several common pump and it＇s typical application in wet etching cleaning equipment was introduced in this paper.
出处
《电子工业专用设备》
2016年第1期43-46,共4页
Equipment for Electronic Products Manufacturing
关键词
泵
湿法腐蚀清洗
自动供液系统
Pump
Wet etching cleaning
Automatic liquid supply system
