基于耦合调制矩形环谐振腔高速电光调制器

Ultra-Compact Coupling Modulation Based High Speed Electro-optic Modulator with Rectangular Ring Resonator

针对基于腔内折射率调制效应的微环电光调制器高Q值和调制带宽相互制约的问题,提出一种基于耦合调制方式的矩形环谐振腔电光调制器.器件由基于受抑全内反射原理的沟槽型光耦合器和基于全反射原理的90°弯曲波导构成.通过建立时域动态模型对器件进行仿真设计,可得其调制相位小于0.2π、静态调制深度大于0.96(归一化最大值为1.0)、调制带宽大于100GHz.该器件片占面积为10μm×15μm,高效紧凑,满足高度集成、低能耗和高速调制等要求,可向二维方向配置和扩展.该器件可应用于单片光子集成回路.

In order to solve the mutual restricted problem between modulation bandwidth and high Qvalue of microring electro-optic modulator which used intracavity index modulation mechanism in the device,an ultra-compact coupling modulation based electro-optic modulator was proposed.This device consists of trench-based frustrated total internal reflection couplers and 90° waveguide bends.A time domain dynamic model was used to evaluate the device performance,and the results show that the modulation phase change is less than 0.2π,the state modulation depth is greater than 0.96（normalized maximum of1.0）,and the modulation bandwidth is greater than 100 GHz.This high speed modulator exhibits a small chip area of 10μm×15μm and a lower power consumption.The compact device configuration shown here is beneficial to the extension at two-dimensional directions,and may be potentially utilized in largescale photonic integrated circuits.