单平面EWOD器件在化学发光检测中的可靠性研究

Reliability Study on a Single Planar EWOD Chip for Chemiluminescence Detection

研究了单平面透明介质上的电润湿(Electrowetting on Dielectrics,EWOD)数字微流体器件在化学发光检测器中的两个可靠性问题.一是通过对介质层的研究,使用PVD制备300nm Ta_2O_5介质层使驱动电压降低至20.7V,在驱动电压26.9V下速度达到40mm/s;二是通过设置片上加热器解决了Teflon的失效问题,使用1W功率加热5min实现片上疏水角恢复至120°.集成嵌入式加热器的EWOD器件用于葡萄糖检测时,最高灵敏度达到0.12V/(μmol·L^(-1)),检测范围1~20 000μmol/L,最低检测限为1μmol/L.

Two reliability issues in single planar transparent EWOD （electrowetting-on-dielectrics） device are studied when it is applied for chemiluminescence detection. Firstly, the driving voltage was decreased to 20. 7 V by using 300 nm Ta2O8 deposited by PVD as the dielectric layer of EWOD. And the driving velocity can achieve 40 mm/s with the driving voltage of 26.9 V. Secondly, an embedded heater was designed and fabricated. It was used to restore the hydrophobic property of Teflon that destroyed by chemil reactiorL With 1 W heating for 5 min, the contact angle of destroyed surface returned to 120%. When the EWOD device with the embedded heater applied in glucose detection, its sensitivity reached 0. 12 V/（μmol · L^-1 ） with the detection range from 1--20 000 μmol/L, and the detection limit of 1μmol/L.