钨化学气相淀积设备的废气处理改善

Improvement of Effluent Management in the Tungsten Chemical Vapor Deposition

钨化学气相淀积反应会生成大量的有害副产物,这些有害气体通过尾气处理器处理去除有害成分或改变化学组成。真空排气管道和尾气处理器常常由于粉尘堵塞需要设备停机定期清理,介绍了粉尘堆积的原因和减少粉尘的方法,通过排气管道加热保温、真空泵温度控制、废气处理器改善等方法大幅度延长管道清洗周期、延长真空泵寿命并延长尾气处理器维护周期。

Substantive harmful by-products in tungsten chemical vapor deposition tools are effluent to reduce the hazard or change the chemical composition by gas abatement system.The downstream exhaust lines and gas abatement system need be cleaned periodically due to clogged exhaust lines and frequent scrubber maintenance.This paper presents the cause of power buildup and the method of reducing powder buildup.With the combination of heated exhaust line,temperature controlled pump and optimized local scrubber inlet,we can significantly improve uptime and lengthen preventative maintenance intervals of the pump lines,pumps and local scrubber.