基于内置光栅的大功率激光二极管

High-power Laser Diodes Based on Built-in Grating

研制了一种用作光纤激光器泵浦光源内置光栅的976nm激光二极管,分析了外延结构和芯片平面结构设计,并着重对内置光栅进行了理论分析和设计,通过技术研究和工艺优化,研制出了满足系统工程应用的激光二极管,其主要光电性能参数如下:中心波长为976±1nm;光谱半宽小于等于1nm;中心波长温度漂移系数小于等于0.1nm/℃;输出功率大于等于10W;发光条宽度小于等于100μm。

With a high power laser diode based on built-in grating as the pump source,the volume of the pump system can be dramatically reduced.And it can also reduce the pressure of the system cooling.In this paper,it is proposed a laser diode based on 976 nm built-in grating as the pump source of a fiber laser.The epitaxial structure and planar structure of chip were designed,and the built-in grating was analyzed emphatically.Thanks to the technical research and process optimization,it is demonstrated that the laser diode can satisfy the requirement of engineering application and the main indexes are obtained as：central wavelength of 976±1nm,full width at half maximum（FWHM）of less than 1nm,drift coefficient of central wavelength with temperature of less than 0.1nm/℃,output power of higher than 10 Wand the width of the light-bar of less than 100μm.