振动电极电化学放电加工技术试验研究

Experimental Investigation on Electrochemical Discharge Machining Technology with Vibration Electrode

电化学放电加工(ECDM)是一种针对硬脆材料的特种微加工技术,在航天MEMS产品制造等领域有良好的应用前景。然而,常规ECDM孔加工深度不足,加工效率随深度增加而显著下降。为此,提出对ECDM的电极施加振动的加工方法。试验对比了不同工艺下的加工效率和精度。结果表明,电极的正弦振动可提高孔加工精度,方波振动可提高加工深度和速率。加工速率随振幅和频率的升高而升高。振动电极ECDM材料去除方式包括热辅助机械冲击、热辅助化学腐蚀以及热蚀。

Electrochemical discharge machining （ECDM）, which could be widely used in MEMS for astronautics applications, is a special machining technology for hard brittle mate- rials. However, the machining depth of traditional ECDM hole is very low, and the machi- ning efficiency decreases with the increase of machining depth. Therefore, vibration elec- trode was applied on tool electrode. Experiments were carried out to compare the machining efficiency and accuracy under different process conditions. The results show that sinusoidal vibration of the electrode increased machining accuracy, and rectangular vibration increased machining depth and efficiency as well. The machining speed increased with the increase of vibration electrode amplitude and frequency. The material removal mechanism of ECDM with electrode vibration inclucled thermal assisted mechanical shock, thermal assisted chemi- cal etching, and direct thermal erosion.