摘要
单晶硅以及工程陶瓷等材料在制造、航空航天及医疗等领域具有十分广泛的应用,由于其硬度大、脆性高、断裂韧性低等固有特性,传统加工的工艺性很差,容易产生裂纹和应力集中,影响工件材料的性能及使用寿命。在进行正交实验的基础上,结合回归分析方法,分析了各主要工艺参数对单晶硅材料加工结果的影响,建立了以切缝宽度以及表面粗糙度为核心的车削质量预测模型,并通过验证试验对该模型的可靠性进行了验证,验证结果表明,该模型具有很高的可靠性。
Monocrystalline silicon and engineering ceramics materials in areas such as manufacturing, aerospace and medical has very wide application, because of its high hardness, high brittleness, low fracture toughness inherent characteristics, traditional processing technology is very poor, easy to produce cracks and stress concentration, affect the performance and service life of the workpiece material.On the basis of orthogonal experiment, combined with the regression analysis method, analyzes the main technological parameters on the result of monocrystalline silicon materials processing, established the kerf width and the surface roughness is the core of turning quality prediction model,and through the validation test the reliability of the model are verified, validation results show that the model has high reliability.
出处
《液压气动与密封》
2016年第2期35-38,共4页
Hydraulics Pneumatics & Seals
基金
国家自然科学基金(51275210)
关键词
磨料水射流
单晶硅
质量预测模型
车削
abrasive waterjet
monocrystal silicon
quality prediction model
turning
