摘要
采用循环阳极氧化-腐蚀法制备了V型多孔阳极氧化铝(PAA)模板,在PAA上热蒸发沉积Ag薄膜后,再原子层沉积TiO2薄膜,制备了TiO2/Ag/PAA三维纳米复合结构。紫外.可见吸收光谱的结果表明,TiO2/Ag/PAA复合结构在可见光区域的吸收率显著提高。当Ag薄膜沉积厚度为30nm,TiO2的原子层沉积厚度为20nm时,所得TiO2/Ag/PAA复合结构的吸收率为94.5%~99.0%。
V-shape porous anodic alumina (PAA) was fabricated by circular anodizing and etching methods. Three-dimensional TiO2/Ag/PAA nanocomposite structures were fabricated by thermal evaporation of a silver (Ag) film and atomic layer deposition (ALD) of a TiO2 film on PAA substrates. The results of UV-Vis spectra show that the optical absorption of the nanocomposite structures is significantly enhanced in the visible light region. The highest absorption is found on the nanocomposite structure with 30 nm thick Ag film and 20 nm thick TiO2 film, and the absorption range is from 94.5% to 99.0%.
出处
《电子元件与材料》
CAS
CSCD
2016年第2期1-4,共4页
Electronic Components And Materials
基金
国家自然科学基金资助项目(No.61171043
51377085
21503261)
上海市科委基础研究重点资助项目(No.14JC1492900)
关键词
阳极氧化
多孔氧化铝
Ag薄膜
纳米复合结构
原子层沉积
光吸收
anodization
porous anodic alumina
silver film
nanocomposite structure
atomic layer deposition
optical absorption