万能工具显微镜的三维改造

Three-dimensional reconstruction of universal measuring microscope

随着科技的创新与进步,传统二维测量技术已经满足不了现在高效率自动化检测的需求,急需新型的三维测量技术。万能工具显微镜作为传统用途广泛、准确度较高和故障率很低的精密测量仪器,目前国内现存量很大,急需对其进行三维自动化改造。该文在万能工具显微镜的基础上,增加3个光栅位移测量系统、自动控制系统以及数据采集分析系统,使其能够实现三维自动测量。

With the innovation and advancement of technology,the traditional two- dimensional measurement technology has failed to meet the current demand for high- efficiency automated testing,need a new type of three- dimensional measurement techniques. The universal measuring microscope widely used as a traditional,high accuracy and low failure rate of precision measuring instruments,domestic stock is great,much- needed renovation of its three- dimensional automated. In view of this situation,this paper are on the basis of universal measuring microscope,an increase of three grating displacement measuring system,automatic control systems,and data acquisition and processing system,to enable them to achieve three- dimensional automatic measurement.