磨削功率监控与功能陶瓷精密磨削工艺优化研究

Grinding power monitoring and research of technology optimizing in functional ceramic precision grinding processes

主要以三重四级杆质谱仪氧化锆陶瓷极座内孔精密磨削为研究对象,建立了磨床主轴在线功率监控系统,对极座磨床HVG-350的主轴功率输出特性进行全周期监控,得到不同工况下的功率特性。同时建立多序氧化铝陶瓷内孔磨削孔径偏差模型,在此基础上设计优化内孔的磨削工艺。经试验表明,工艺优化后,内孔磨削的效率提升了36.72%,孔径偏差波动稳定在1μm以内。

Selects the base bore precision grinding of the triple quadrupole mass spectrometer as the main research object, monitors the power output characteristic of precision bore grinder HVG-350 for the whole period, and establishes diameter deviation model of multi-process grinding bore precision. On this basis, the grinding processes are optimized. Experiment results show that the optimized processes improve grinding efficiency of 36.72% , and the diameter deviation fluctuates within 1μm or less.