摘要
首先,介绍了肖特基二极管的基本原理和主要性能;然后,利用扩散势垒和多层金属化结构设计工艺对肖特基二极管进行了改进。结果表明,上述两种工艺能够使得肖特基势垒界面横向结构十分稳定,器件高温反向特性、低温正向特性得到提高,反向耐压与抗浪涌冲击能力大大增强,因而建议大力推广使用。
Firstly, the basic principle and main performance of schottky diode are introduced.And then, the diffusion barrier and multi-layer metal structure design process are adopted to improve the schottky diode. The results show that the two design methods can make the lateral structure of the schottky barrier interface very stable, improve the high temperature reverse char-acteristic and low temperature positive characteristic of the device, and greatly enhance reverse voltage endurance capability and anti surge impact capability, which are worthy to be popularized.
出处
《电子产品可靠性与环境试验》
2016年第1期40-43,共4页
Electronic Product Reliability and Environmental Testing
关键词
肖特基二级管
扩散势垒
多层金属化
反向耐压
高温性能
可靠性
schottky diode
diffusion barrier
multiple-layer metallization
reverse voltage en- durance capability
high temperature performance
reliablility