精密机床液体静压导轨直线度误差检测与分析

Precision Machine Hydrostatic Guideway Straightness Error Detection and Analysis

采用RenishawXL-80激光干涉仪检测液体静压导轨运动的直线度误差,对直线度误差和干涉测量的原理进行了探讨。并在不同环境下进行直线度误差测量,根据测量结果做出了直线运动偏差特性曲线。对测得的多组数据进行分析,消除了系统误差,进行了正态性检验,剔除了粗大误差,得出了基于t分布的表达方式并进行了t检验。检验结果表明,导轨直线度误差约为2.791μm/360mm,且在振动小、噪声小、光照弱、安静的环境下直线度误差较小,测得的数据较准确。

This paper uses the laser interferometer RenishawXL-80 to detect the straightness error when the hydrostatic guideway moves linearly,and discusses the principle of straightness error and interferometry.The straightness errors in different working environment are measured.Based on the collected data,the deviation characteristic curve of linear motion is made.The systematic error is eliminated after analyzing the multiple sets of data.Then the normality test is carried out to reject the gross error,and the expression based on t distribution is obtained.The test results show the straightness error of the guideway is about 2.791μm/360 mm.And the data will be more accurate when they are measured in the small vibration,little noise,weak light and quiet environment.