基于ANSYS的单晶炉整体结构模态分析

The Model Analysis for the Whole Structure of the Single Crystal Furnace Based on ANSYS

实际生产发现,某型号单晶炉提拉系统在引晶阶段常会出现软轴摆动和坩埚中多晶体液面不稳定的现象,严重影响单晶硅的质量和生产效率。本文建立某型号单晶炉整体结构的有限元模型,对单晶炉整体结构做引晶阶段的模态分析,找出提拉系统软轴摆动和坩埚液面抖动的原因,为实际生产提供参考。同时,根据静力分析和模态分析的结果对单晶炉结构进行改进,在保证其强度和刚度的情况下,使单晶炉的固有频率尽可能地避开外源激振频率,解决该型号单晶炉在生产中出现的问题。

In practical production, flexible shaft of lifting system swing and surface of molten polysilicon in the crucible shaking often appear during seeding stage, which influenced quality of crystal and production efficiency seriously.The paper established 3D solid model of the whole structure of the single crystal furnace and its finite element model. The model analysis of overall structure were made respectively so as to find out the reasons of flexible shaft swing and the surface shaking during seeding stage;Finally, based on the analysis, improvement on the furnace structure was finished to make its inherent frequency avoid the external excitation frequency.