摘要
Surface acoustic wave （SAW） devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed.
Surface acoustic wave （SAW） devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed.
基金
supported by the National Natural Science Foundation of China(Nos.60936002,61025021,61434001,61574083)
the State Key Development Program for Basic Research of China(No.2015CB352100)
the National Key Project of Science and Technology(No.2011ZX02403-002)
the Special Fund for Agroscientific Research in the Public Interest of China(No.201303107)
additionally supported by the Postdoctoral Fellowship(PDF)program of the Natural Sciences and Engineering Research Council(NSERC)of Canada and the China Postdoctoral Science Foundation(CPSF)
