摘要
本文结合真空检漏的概念及意义,根据真空自耗电弧炉真空系统的特点,详细讲述了真空检漏的原理及其注意事项,通过实际生产过程中实际的检漏过程总结出了检漏仪应用过程中的注意事项,对今后实际生产具有重要的指导意义。
This paper has described the working principles and notices for vacuum leakage rate detection, in which the concept and importance of leakage rate detection as well as the characteristics of vacuum system of VAR furnace have been brought out. The matters needing attention were learnt from the actual experience by applying leakage meter, and this will benefit a lot for the future production.
出处
《真空》
CAS
2016年第1期66-68,共3页
Vacuum
关键词
检漏
真空度
氦质谱检漏仪
leakage detection
vacuum degree
helium mass spectrometer leakage detector