激光掺杂形成硼背场PERL硅太阳电池的研究

STUDY OF LASER DOPING BORON FOR PERL SILICON SOLAR CELL

研究两种激光器(绿光纳秒调Q激光器和准连续紫外高频锁模激光器)对PERL太阳电池的背面掺硼的效果。通过分析扫描电子显微镜(SEM)、电化学ECV曲线和少子寿命的数据,确定合适的激光器及激光参数。继而研究烧结温度对太阳电池性能的影响。综合分析电池的反射率、内量子效率、电性能参数及烧结后铝硅接触的SEM剖面图,得到最优烧结温度。研究发现用准连续紫外高频锁模激光器(7 W,250 mm/s)进行激光掺硼、以630℃烧结,所得电池效率最高可达19.90%。

Two kinds of lasers （green ns Q-switch laser and high-frequency UV quasi-continuous mode-locked laser） were investigated for doping boron of PERL silicon solar cells. Suitable laser and parameters were selected by analyzing SEM images, ECV profiles and minority carrier lifetime. Then the effect of firing temperature on solar cells＇ performance was studied. The refiectivity, IQE, electrical properties parameters of solar cells and SEM sectional images of A1/Si interface after firing were discussed. The efficiency of solar cell reached up to 19.90% by using high-frequency UV quasi- continuous mode-locked laser （7 W, 250 mm/s）to dope boron, then firing at 630℃.