摘要
A triaxial high-g accelerometer of microelectro mechanical systems （MEMS） has a struc- ture of multi-chips combination and will be used in aerospace field, civil and military fields. The ac- celerometer can measure the acceleration of the carrier. The chips with island-membrane structures on its back surfaces are made by MEMS dry processing. The chip is reasonable and can work well under high impact load; Titanium alloy base is also stronger in high shock environment, these are proved by finite element analysis. Finally, the MEMS combined triaxial high-g accelerometer is vali- dated by high impact calibration experiments in order to get a key performance index, including range, sensitivity and transverse sensitivity and so on. These data can satisfy the need of design but some problems remain, these will be eliminated by improvement of the processing technology and materials.
A triaxial high-g accelerometer of microelectro mechanical systems （MEMS） has a struc- ture of multi-chips combination and will be used in aerospace field, civil and military fields. The ac- celerometer can measure the acceleration of the carrier. The chips with island-membrane structures on its back surfaces are made by MEMS dry processing. The chip is reasonable and can work well under high impact load; Titanium alloy base is also stronger in high shock environment, these are proved by finite element analysis. Finally, the MEMS combined triaxial high-g accelerometer is vali- dated by high impact calibration experiments in order to get a key performance index, including range, sensitivity and transverse sensitivity and so on. These data can satisfy the need of design but some problems remain, these will be eliminated by improvement of the processing technology and materials.
基金
Supported by the National Natural Science Foundation of China(61273346)
the National Defense Major Fundamental Research Program of China(20110003)
the National Defense Key Fundamental Research Program of China(20132010)
Specialized Research Fund for the Doctoral Program of Higher Education(20121101120009)
Excellent Young Scholars Research Fund of Beijing Institute of Technology(2012YG0203)
the Program for the Fundamental Research of Beijing Institute of Technology(2015CX02034)
