Fluid Flow Characteristics in Micro-Pump with the Aid of Peltier Devices and Thermal Expansion Material

Fluid Flow Characteristics in Micro-Pump with the Aid of Peltier Devices and Thermal Expansion Material

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作者 Shuichi Torii Yasuhiro Takakura

机构地区 Graduate School of Science and Technology

出处《Journal of Energy and Power Engineering》 2016年第2期93-101,共9页 能源与动力工程（美国大卫英文）

关键词半导体器件膨胀材料流动特性工作流体微泵冷却性能流体流动粒子图像测速 Flow visualization, micropump, Peltier device, X-ray.

参考文献6

1Terry, S. C. 1979. “A Gas Chromatographic Air AnalyzerFabricated on a Silicon Wafer.” IEEE Transaction on Electron Device 26 (12): 1880-6.
2Maruyama, S. 2006. Handbook of Heat and Fluid Engineering in Micro and Nano Scales. Kinokuniya: NTS Corporation, 378-97.
3van Lintel, H. T. G. 1979. “Piezoelectric Micropump Based on Micromachining of Silicon.” Sensor. Actuat. 15(2): 153-68.
4Stemme, E., and Stemme, G. 1993. “A Valveless Diffuser/Nozzle-Based Fluid Pump.” Sensor. Actuat. A 39(2): 159-67.
5Tsai, J. H. 2002. “Thermal Bubble Actuated Nozzle-Diffuser Miro Pump.” Journal of Microelectromechanical Systems 11 (6): 665-71.
6Kline, S. J., and McClintock, F. A. 1953. “Describing Uncertainties in Single-Sample Experiments.” Mechanical Engineering 75 (1): 3-8.

Journal of Energy and Power Engineering

2016年第2期

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