基于质谱检漏仪的氦、氢介质检漏的研究

Based on Quality Spectrum Leak instrument of Helium, and Hydrogen Media Leak of Research Mr

本文从质谱检漏仪的基本原理及标定原理出发,实验探讨质谱检漏仪氦、氢模式下的离子加速电压,以及氦、氢介质检漏时的漏率信号,分析产生这些现象的原因,总结出影响这种结果的诸多因数。

paper from quality spectrum leak instrument of principle and the calibration principle starting, experiment discussion quality spectrum leak instrument helium, and hydrogen mode Xia of ion accelerated voltage, and helium, and hydrogen media leak Shi of leak rate signal, analysis produced these phenomenon of reasons, summary out effect this results of many factor.