LED行业用废氨气处理技术

Treatment Technology of Exhaust Ammonia in LED Industry

MOCVD金属有机物化学气相沉积法制备LED外延技术产生的尾气危害较大,需要进行处理才能排放。对现有的几种尾气处理技术进行分析,指出各自存在的优点和缺点。从回收利用和节能减排两个角度出发,对原有方法进行了改进,提出四级尾气吸收的新型尾气处理技术,实现了氨气的回收利用,降低对大气的污染。

In the process of producing LED by MOCVD,a large amount of exhaust ammonia is emitted,which is harmful to the atmosphere. So the exhaust gas must be discharged. In this paper,several kinds of exhaust gas treatment technologies are analyzed,and the advantages and disadvantages of the existing technologies are pointed out. From the two aspects of recycling and reducing emissions,the old method is improved,and the new technology is researched. Our technology which is four levels of gas absorption achieves the recycling of ammonia and reduces the pollution of the atmosphere.