激光外差干涉仪在直线位移台滚转特性测量上的应用

Application of Laser Heterodyne Interferometer in the Roll Characteristics Measurement of Linear Displacement Stage

为了实现工业中较大直线位移上的滚转角快速测量,设计了一种基于激光外差干涉技术的几何空间对称四光路滚转角测量系统,并针对缺少滚转参数的较大行程位移台,进行了滚转特性测量试验。试验证明,几何空间对称四光路滚转角测量系统稳定性好,抗干扰能力强,不仅有效消除了其它自由度误差的串扰,还能够高效地测出不同精度直线位移台的滚转特性,并灵敏地再现了直线位移台工作条件发生改变时工作台滚转角变化。使用常用的2π/512细分的相位计和宽度为120mm的楔面反射镜,系统角测量分辨率为0.8″,最大可测行程达到6m。若将相位计细分提高100倍,滚转角的测量分辨率将达到0.008″。当楔面反射镜宽度提高1倍,最大可测行程超过10m。

In order to achieve a rapid roll angle measurement of larger linear displacement stages in the industry,this paper introduces a roll angle measurement system with four symmetry optical paths basing on laser heterodyne interferometry and tests the roll characteristics of several linear near displacement stages which lack of roll parameters.The results prove that the roll angle measurement system with four symmetry optical paths shows good stability and strong anti-interference ability,and it not only effectively eliminates the crosstalk errors,but also can efficiently detect the roll characteristics of different precision linear displacement stages,and sensitively reflect the roll angle variation when working conditions change.Using common 2π/512 subdivision phase meter and a width of 120 mm Wedge Mirror,the roll angle resolution is 0.8″,the maximum measurable stroke is 6m.If the subdivision of phase meter increased 100 times,the roll angle resolution will reach 0.008″.If the width of Wedge Mirror increased 1time,the maximum measurable stroke will be over 10 m.