背压式硅压阻压差传感器的研制

Research on Back-pressure Silicon Piezoresisitive Differential Pressure Sensor

根据伺服系统高精度、高可靠性的测量需求,研制一种背压式硅压阻压差传感器。传感器基于硅的压阻效应,与目前硅压阻压差传感器使用薄膜隔离式敏感芯体不同,其感压芯片的背部直接接触被测介质感受压力,避免了硅油介质传递压力。因此,敏感芯体结构简单可靠,提高了传感器长期承压的可靠性。介绍背压式硅压阻压差传感器的原理及设计与实现,主要包括芯体设计、电路设计、结构设计等。传感器通过性能试验以及环境适应性试验的考核,并在伺服系统上进行相关试验,结果证明能够满足伺服系统使用要求。

According to the measurement requirements of servo system with high accuracy and high reliability, a kind of back-pressure type silicon piezoresistive differential pressure sensor is developed. The sensor is based on piezoresistive effect of silicon, unlike the current silicon piezoresistive differential pressure sensor using the thin-film isolation sensitive core, the back of the pressure sensing chip directly contacts the measured medium to sense pressure, so as to avoid the oil medium transferring pressure. Therefore, the sensitive core has a simple and reliable structure, and can improve the sensor＇s reliability of long-term pressure-bearing. The principle and the realization and design of back-pressure silicon piezoresistive differential pressure sensors are introduced in this paper, mainly including： the core design, circuit design, and structure design. The sensor passed through evaluation of the performance test and environmental adaptability test, and also was tested in the servo system, and the results proved the sensor can meet the application requirements of servo system.