期刊文献+

A Review:Structural Oxide Coatings by Laser Chemical Vapor Deposition 被引量:4

A Review:Structural Oxide Coatings by Laser Chemical Vapor Deposition
下载PDF
导出
摘要 Yttria-stabilized zirconia and-alumina films were prepared by laser chemical vapor deposition at deposition rates of several hundred micrometers per hour.Moreover,the structural oxide coatings by laser chemical vapor deposition are reviewed.The laser can significantly accelerate the chemical reaction and grain growth in CVD,yielding high deposition rates.The films contain large amounts of nanopores that act as thermal insulation and are thus promising as coating materials for gas turbine blades of Ni-based superalloys and WC-Co cutting tools. Yttria-stabilized zirconia and-alumina films were prepared by laser chemical vapor deposition at deposition rates of several hundred micrometers per hour.Moreover,the structural oxide coatings by laser chemical vapor deposition are reviewed.The laser can significantly accelerate the chemical reaction and grain growth in CVD,yielding high deposition rates.The films contain large amounts of nanopores that act as thermal insulation and are thus promising as coating materials for gas turbine blades of Ni-based superalloys and WC-Co cutting tools.
作者 Takashi GOTO
出处 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2016年第1期1-5,共5页 武汉理工大学学报(材料科学英文版)
关键词 laser CVD yttria-stabilized zirconia alumina plasma nano-pores laser CVD yttria-stabilized zirconia alumina plasma nano-pores
  • 相关文献

参考文献27

  • 1HIRAUI T, NIIHARA K, GOTO T. Rapid Chemical Vapour-deposition of Si3N4[J]. J. Mater. Sci., 1977, 12:631-634.
  • 2HIRAI T, GOTO T, KAJI T. Preparation of Silicon Carbide by Chemical Vapor Deposition[J]. Ceram. Soc. Japan, 1983, 91:503-507.
  • 3DUTY C, JEAN D, LACKEY WJ. Laser Chemical Vapour Deposition: Materials, Modelling, and Process Control[J]. lnter Mater Rev., 2001, 46:271-274.
  • 4KIMURA T, GOTO T, Rapid Synthesis of Yttria-stabilized Zirconia Films by Laser Chemical Vapor Deposition[J]. Mater Trans., 2003, 44: 421-427.
  • 5MIYAZAKI H, KIMURA T, GOTO T. Acceleration of Deposition Rates in a Chemical Vapor Deposition Process by Laser Irradiation[J]. Jpn. .I. Appl. Phys., 2003, 42:L316-319.
  • 6ZHANG S, TU R, GOTO T. High-Speed Epitaxial Growth of 13-SIC Film on S i(111 ) Single Crystal by Laser Chemical Vapor Deposition[J], J. Amer Ceram. Soc., 2012, 95:2 782-2 785.
  • 7KIMUKA T, GOTO T. Rapid Synthesis of Yttria-stabilized Zirconia Films by Laser Chemical Vapor Deposition[J]. Mater Trans., 2003, 44: 421-426.
  • 8TU R, KIMURA T, GOTO T. Rapid Synthesis of Yttria-Partially- Stabilized Zirconia Films by Metal-Organic Chemical Vapor Deposition [J]. Mater Trans., 2002, 43:2 354-2 360.
  • 9AKIYAMA Y, SATO T, 1MANISHI N. Reaction Analysis for ZrO2 and Y203 Thin Film Growth by Low-Pressure Metalorganic Chemical Vapor Deposition Using b-Diketonate Complexes[J]. J. Cryst. Growth, 1995, 147:130-135.
  • 10PUVER M, NEMETZ W, WAHL G. CVD of ZrO2, A1203 and Y203 from Metalorganic Compounds in Different Reactors [J]. Surf. Coat. Tech., 2000, 125:400-406.

同被引文献24

引证文献4

二级引证文献26

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部