摘要
The effect of substrate temperature on the structure and magnetic properties of CoPt/AlN multilayer films has been investigated.The crystallinity of CoPt has been improved with increasing substrate temperature from room temperature to 400 ℃.After post-annealing process,L1_0 CoPt structure transformation has also been promoted.However,since the easy magnetic axis of L1_0 CoPt is in[001]orientation,the promotion of L1_0 CoPt transformation causes the change of easy magnetic axis in（111） textured CoPt layers,which impairs the perpendicular magnetic anisotropy.The optimum substrate temperature should be room temperature to obtain the strongest perpendicular magnetic anisotropy according to the results of the present work.
The effect of substrate temperature on the structure and magnetic properties of CoPt/AlN multilayer films has been investigated.The crystallinity of CoPt has been improved with increasing substrate temperature from room temperature to 400 ℃.After post-annealing process,L1_0 CoPt structure transformation has also been promoted.However,since the easy magnetic axis of L1_0 CoPt is in[001]orientation,the promotion of L1_0 CoPt transformation causes the change of easy magnetic axis in（111） textured CoPt layers,which impairs the perpendicular magnetic anisotropy.The optimum substrate temperature should be room temperature to obtain the strongest perpendicular magnetic anisotropy according to the results of the present work.
