摘要
光刻机被称为人类最精密复杂的机器,业界将其誉为集成电路产业皇冠上的明珠。本文首先回顾了光刻机技术的发展历程,然后以阿斯麦公司为例,介绍了光刻机领军企业的发展历程,接着分析了促成其成功的诸多因素,具体包括模块化分工外包协同、适宜的产品更新和经营管理策略、官产学研协同,最后提出了我们的思考和建议。
Mask aligner lithography systems is possibly the most precise instrument ever invented by mankind. It is described as the Crown Jewel of integrated circuit indus- try. In this paper, we first review the history of lithogra- phy technology. Then, several possible factors resulted in today's achievement of ASML are analyzed separate- ly, which includes modular division of labor outsourc- ing, reasonable business strategy, and official research collaboration. Basing on these discussions, we share our thinking of this case, and also provide suggestions from our side.
出处
《中国基础科学》
2015年第6期48-52,共5页
China Basic Science
关键词
阿斯麦
光刻机
模块化分工外包协同
官产学研协同
ASML
modular division of labor outsourc-ing
business strategy and official research collaboration