2SEMI F1-96 Specification for leak integrity of high-purity gas piping systems and components [ S ].
3SEMI F106-0308 Test method for determination of leak integrity of gas delivery systems by helium leak detector [S].
4SEMI F27-0997 Test method for moisture interaction and content of gas distribution systems and components by atmospheric pressure ionization mass spectrometry (apims) [S].
5SEMI F35-0304 Test method for ultra-high purity gas distribution system integration verification using non-invasive oxygen measurement [S].
6SEMI F70-0302 Test method for determination of particle contribution of gas delivery system [ S ].
7《The journal of environmental sciences》1998.4.45
8张洪雁译.《微电子污染控制手册》.中国航天建筑设计研究院,1994,
9《BS 5295Envirionmental Cleanlines in Enclosed Spaces》,London, 1986
