“纳米制造的基础研究”重大研究计划研究进展

Research Review of the NSFC Major Research Plan “Fundamental Research on Nanomanufacturing”

国家自然科学基金委员会(National Natural Science Foundation of China,NSFC)重大研究计划'纳米制造的基础研究'瞄准学科发展前沿、面向国家发展的重大战略需求,旨在针对纳米精度制造、纳米尺度制造和跨尺度制造中的基础科学问题,探索纳米制造过程的基本规律,发展若干原创性的纳米制造工艺与装备原理,为实现纳米制造的一致性与批量化提供理论基础。介绍'纳米制造的基础研究'重大研究计划实施6年来的申请、资助情况和实施过程中采取的管理举措;回顾该重大研究计划在学科交叉融合、国内重大科研仪器与基础试验技能共享等方面获得的显著成效;总结项目研究团队在光学自由曲面抛光、晶圆平坦化与减薄、纳米切削、电场辅助纳米压印光刻、超快激光加工和半导体器件制造等方面取得的原创性成果和突出进展;同时,简要介绍了依托这些成果立项的4个集成项目的基本情况。

National Natural Science Foundation of China major research plan ＂Fundamental Research on Nanomanufacturing＂ focuses on the frontiers of fundamental research on nanoprecision manufacturing, nanoscale manufacturing, and multi-scale manufacturing to meet the key strategic needs of the national development, explore the basic laws of nanomanufacturing processing, develop novel nano-manufacturing techniques and equipment mechanisms, and to provide a theoretical basis for nano-manufacturing repeatability and volume production. The application and funding information and management measures during the 6 implement years have been introduced. The significant effects obtained in aspects of crosses and integration between disciplines, sharing of the scientific and research instruments and basic experimental technologies have been reviewed. Original research achievements and outstanding progresses in the fields of optic free surface polishing, wafer planarization and thinning, nano-cutting, electro-assisted nanoimprint lithography, ultra-short laser pulse nanofabrication and microelectronics device manufacturing are summarizes. At the same time, the backgrounds, scientific objectives and key issues of the four integrated projects integrated based on the achievements of the major research plan have also been briefly introduced.