摘要
用电弧增强磁控溅射(AEMS)装置在高速钢(W18Cr4V)和Si(100)基体上制备了具有TiN过渡层的BCN薄膜,用X射线衍射(XRD)仪和傅里叶红外光谱(FTIR)分析了薄膜的微观结构,用划痕仪测试了薄膜的结合力,用显微硬度计和销盘式摩擦磨损实验仪测试了薄膜的硬度和摩擦学性能。结果表明:本实验条件下制备的具有Ti N过渡层的BCN薄膜的硬度为23 GPa,薄膜与GCr15钢球对磨的摩擦系数为0.3,具有TiN过渡层的BCN薄膜的结合力和摩擦学性能较BCN单层薄膜有明显提高。
BCN thin film with Ti N interlayer was deposited on HSS（W18Cr4V） and Si（100） substrates by arc enhanced reactive magnetron sputtering（AEMS）. Microstructure of the thin film was characterized by XRD and FTIR. Adhesion to the substrate of the thin film was characterized by scratch test. Hardness and tribological behavior of the thin films were investigated by microhardness indenter and pin on disc tribometer, respectively. The result shows that micro-hardness and the friction coefficient against GCr15 steel balls of the BCN thin film with TiN interlayer is 23 GPa and about 0.3, respectively. Besides, the adhesion and tribological properties of the BCN thin films with TiN interlayer are obviously better than those of the BCN monolayer thin films.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2016年第2期503-506,共4页
Rare Metal Materials and Engineering
基金
西安交通大学金属材料强度国家重点实验室开放研究项目(20141604)
安徽理工大学青年教师科学研究基金资助项目(QN201316)
