自光感型支化酰亚胺制备及其性能研究

Study On Preparation and Performance of Autophotosensitive Branched Imide Oligomers

采用星型氨基单体和各种芳香二酐单体并与邻位烷基苯胺封端合成一系列自光感型支化酰亚胺(HPI),并进行了表征。紫外光谱表明HPI薄膜具有较高的透光性,同时HPI-1薄膜具有较低介电性能。HPI薄膜也表现出较高的玻璃化转变温度(Tg>190℃)和良好的热稳定性能(T5%>506℃)。紫外光刻蚀后的薄膜经过SEM分析,表明具有较细的条带(4μm)。

A series of autophotosensitive branched imide oligomers based on a muhifunctional amino, various aromatic dianhydride monomers, and terminated with ortho-alkyl aniline was synthesized and characterized. The UV-vis spectra indicated a high optical transparency of HPI films. The spin-coated films of HPIs presented a low dielectric constant. The HPI films also showed high glass transition temperatures above 190℃, good thermal stabilities with 5wt% loss temperatures. The photolithographic property of the polymer was examined by UV exposure. The SEM analysis revealed that a highly resolved pattern with a line width of 4μm were obtained.