硅基单结太阳能电池的制备技术、缺陷及其性能的研究

Researches of Preparation Technologies,Defects and Properties of Silicon Based Single-junction Solar Cells

首先综述了硅基单结太阳能电池的分类、制备方法及进展,介绍了化学气相沉积法、液相外延法(LPPE)、金属诱导结晶法(MIC)、磁控溅射法以及分子束外延法等各种硅基太阳能电池的制备方法,阐述了各种制备工艺的优缺点。其次,总结了单晶硅、多晶硅以及非晶硅太阳能电池在组织结构、缺陷方面的研究现状。最后,对硅基太阳能电池的机械、电学、光学以及光电性能等方面的研究进展做了论述。

The classification, preparation technology and development of silicon based single-junction solar cells are reviewed firstly. All kinds of preparation methods of silicon solar cells such as chemical vapor deposition, liquid phase epitaxy （LPPE）, metal induced crystallization （MIC）, magnetron sputtering and molecular beam epitaxy are then introduced. In addition, the advantages and disadvantages of various preparation techniques are described. The research status of silicon, polycrystalline silicon and amorphous silicon solar cells are summarized. Finally, the re- search progress on the mechanical, electrical, optical and photoelectric properties of silicon based solar cells is discussed.