基于新型探针的双频原子力显微系统开发

Dual-Frequency Atomic Force Microscopy System Development Based on New Sensing Probe

传统原子力显微镜(AFM)在接触模式下工作时具有接触力较大、易损伤样品的缺点.本文通过对新型自感应音叉探针施加双频激励,使得AFM工作在轻敲模式下,减小了接触力和扫描过程中的侧向力影响,实现了样品表面力学特性和亚表面结构的表征.然后利用基于DSP的PI反馈控制模块,完成了线扫描实验,证明该双频原子力显微测量系统具有较好的测量能力.

Traditional atomic force microscope（ AFM） working in contact mode suffers the shortcoming that the contact force is strong and tends to damage the samples. In this paper,dual-frequency excitation is applied to a new sensing probe. The tuning fork makes the AFM system work in tapping mode,reducing the contact force and lateral force in the process of scanning. It also achieves the characterization of samples＇ surface mechanical properties and structures of sub-surface. Linear scanning experiment using the PI feedback controlling module based on DSP proves that the dual-frequency atomic force microscopic measurement system enjoys great measuring ability.