摘要
提出了一种针对单自由度音圈电机的控制方法,以实现音圈电机在竖直方向上的快速响应以及精确控制。通过实验测量的方式,获得音圈电机在竖直方向上的受力-位置的关系,并将其应用于该控制系统中。基于该受力-位置关系,在控制系统中设计了反馈线性化单元和PID控制单元。最后通过一套自行设计的实验装置验证了所提出的控制方案的可行性,实验结果表明,该系统的静态误差小于1μm,阶跃响应速度小于50 ms,轨迹跟踪的最大误差小于20μm且最大延迟时间小于5ms。
A control method for a single degree of freedom voice coil motor that can achive precise control and rapid response in the vertical direction is proposed.The relationship of force-airgap which is applied to this system is acquired through measurement.Based on the relationship of force-airgap,feedback linearization unit and PID controller for this system are designed.At last,the possibility of the proposed control method is verified by a set of self-designed experiment device.Experiental results show that the static error is less than 1 μm,the velocity of step response is less than 50 ms,the maximum error of trajectory tracking is less than 20 μm and the maximum delay is less than 5 ms.
出处
《测控技术》
CSCD
2016年第2期62-66,共5页
Measurement & Control Technology
基金
国家973计划资助项目(2011CB707904)
关键词
磁悬浮平台
音圈电机
反馈线性化
PID控制器
magnetic levitation platform
voice coil motor
feedback linearization
PID controller
