显微镜自动对焦系统的设计

Design of Microscope Autofocus System

针对显微镜手动调焦复杂,较难得到最佳状态下的图像的现状,提出了一种自动对焦系统。该系统既可以实现X轴、Y轴的单独运动,也可以实现X轴、Y轴的联动控制,调焦电机控制检测平台Z方向的移动以达到对焦的功能。该系统通过步进电机控制器进行精确控制,其X-Y定位精度达到0.002mm,对焦定位精度为25nm。通过大量实验,表明该系统能可靠运行,可为类似应用提供一定参考。

To the problems of complex manual focusing of microscope,difficult to obtain a best image,we propose an automatic focusing system.The system can realize the X-axis and Y-axis movement alone,can achieve linkage control of X-axis and Y-axis.The focus motor controls Zdirection motion of the detection platform to realize focusing function.The stepping motor controller is used to realize the precise control of the system,the X/Y positioning accuracy is 0.002 mm,focusing positioning accuracy is 25 nm.A large number of experiments show that the system can operate reliably,it can provide a reference for the similar application.