反歧化法制备三氯氢硅工艺的研究与优化

Research and optimization on preparation of trichlorosilane by anti-disproportionation method

以改良西门子法多晶硅生产过程中副产物二氯二氢硅和四氯化硅为原料生产三氯氢硅。应用Aspen Plus软件进行工艺模拟和优化,同时进行催化剂的选型。采用固定床反应器,对模拟结果进行优化,以二氯二氢硅空速、反应温度、反应压力为试验参数进行正交试验,确定最佳工艺条件。采用气相色谱对原料和产物进行检测。实际生产结果表明:在最佳反应条件即反应温度为55℃、反应压力为0.7 MPa(G)、反应物空速为250 kg/h条件下,转化率均介于98%—99%之间,满足实际生产的需求。

The trichlorosilane was produced using by-products（ dichlorosilane and silicon tetrachloride） which generated in modified Siemens method process during poly-silicon production as raw materials. The process simulation and optimization were carried out by Aspen Plus software and the catalyst was selected simultaneously.The simulation results were optimized by fixed-bed reactor. Using the space velocity of dichlorosilane,reaction temperature,reaction pressure as parameters,the orthogonal experiment was performed to determine the optimum conditions. The feed and product were characterized by gas chromatography. The result shows that the conversion rate of dichlorosilane is between 98%-99% under optimal reaction conditions of reaction temperature 55 ℃,reaction pressure 0. 7 MPa（ G）,feed space velocity 250 kg / h.