原子力显微镜探针悬臂弹性常数校正技术进展

Research progress on the calibration methods for elastic constant of atomic force microscopy cantilevers

利用原子力显微镜对材料表面的力学性能进行定量表征时,需要准确知道原子力显微镜探针悬臂的弹性常数,所以对弹性常数进行校正十分重要。该文综述近年来对探针悬臂弹性常数的校正方法,主要包括维度法、静态挠度法、动态挠度法。维度法对不同悬臂形状(主要针对矩形、V型)进行阐述,分析不同方法使用的数学模型与优缺点;静态挠度法不仅对方法的数学模型进行阐述,还着重介绍近年来对该方法精确度的改进研究;动态挠度法以附加质量法、Sader法与热调谐法分别阐述,比较3种方法的模型特点与先进性;最后分析常用探针适合使用的校正方法,对今后校正方法的发展提供参考。

It＇s vital to know exactly the elastic constant of the cantilever of an atomic force microscope before the mechanical properties of material surfaces are quantitatively characterized with this device. This paper has reviewed corresponding calibration methods used in recent years,comprising dimensional method,static deflection and dynamic deflection. The dimensional method is designed for expounding different cantilever shapes（mostly rectangular and V-shaped）, the mathematical models and their advantages and disadvantages of different methods will be analyzed in this paper. The static deflection is used to explain the mathematical models and the study on the accuracy improvement of these methods particularly. The dynamic deflection is reviewed separately with three approaches namely added mass method, Sader method and thermal tuning method. The model characteristics and advancement of the three methods are compared here. In the end, several suitable calibrations also be discussed for common cantilevers; the research prospect of these calibration methods are proposed.