聚焦离子束加工中的缺陷及成因

Drawbacks in the focused ion beam processing and the causes

聚焦离子束技术作为一种直接加工微纳米结构的工具,在很多领域有着重要的应用。但在实际应用中,它并不能总是如人所愿,加工出的结构有时会产生缺陷。如在切割截面时会形成倾斜侧壁、窗帘结构;在刻蚀平面结构时形成非均匀的底面;在利用气体注入系统诱导沉积生长结构后残留污染物等。本文将剖析聚焦离子束加工中这些常见缺陷产生的根源,探讨减轻或消除这些缺陷的方法。

Focused ion beam（ FIB） has gained widespread use in many fields,such as materials science,electronics,life sciences and industrial manufacturing,due to its site-specific fabrication by milling materials and beam induced deposition of materials. But there are some fabricating drawbacks for FIB in practice. This paper revealed the causes for the common drawbacks such as sloped sidewall,curtain structure on the cross section,and contamination of residual injected gas precursor molecules. Some methods were proposed to minimize the fabricating drawbacks and improve the performance of FIB.