FIB-SEM双束技术简介及其部分应用介绍

FIB-SEM dual-beam system and its partial applications

聚焦离子束(FIB)与扫描电子显微镜(SEM)耦合成为FIB-SEM双束系统后,通过结合相应的气体沉积装置,纳米操纵仪,各种探测器及可控的样品台等附件成为一个集微区成像、加工、分析、操纵于一体的分析仪器。其应用范围也已经从半导体行业拓展至材料科学、生命科学和地质学等众多领域。本文介绍了双束系统中的一些关键概念及基本原理并综述了其在材料科学领域的一些典型应用,包括透射电镜(TEM)样品制备,微纳尺度力学测试样品制备以及材料三维成像及分析。

Focused ion beam（ FIB） achieved widespread use and applications in the materials and biological sciences when it was coupled with a scanning electron microscope（ SEM） column into a dual-beam system. The FIB-SEM dual-beam system combining the gas injection systems,detectors,nanomanipulator and controlled stages has become a powerful research tool,which can be used to image,mill,deposit,manipulate,and analyze. This paper provided the key concepts in FIB-SEM dual-beam system,and reviewed the applications in materials science,such as the sample preparation for TEM,the application in studying the properties of micro /nanomaterilas,and three-dimensional characterization.