多晶硅废气淋洗系统的应用

Application of Wast Gas scrubbing System of Polysilicon Device

废气淋洗装置是多晶硅生产线的重要组成部分。本套废气淋洗装置充分改进了传统西门子法制取多晶硅废气淋洗的工艺,实现了机械化、自动化,具有自动化程度高,氯硅烷处理能力大,工艺稳定等优点。

Wast gas scrubbing device is an important part of the polysilicon production lines.The full set of wast gas scrubbing device has modified the traditional process of polysilicon Siemens Preparation,and has achieved the mechanization and automation,with advatages of a high degree of automation,large chlorosi-lane processing capacity,process stability ect.