摘要
采用实验室研制的石英钟罩式MPCVD装置,在低功率(950 W)条件下,以H2-CH4为反应气源,在不同甲烷浓度下沉积了金刚石膜。利用扫描电子显微镜、激光拉曼光谱及X射线衍射仪等对金刚石膜二次形核现象进行了分析。实验结果表明:甲烷浓度变化对金刚石膜沉积过程中二次形核有不同程度的影响。甲烷浓度由1.0%上升到2.5%时,薄膜中二次形核现象逐渐增加,晶粒尺寸逐渐减小,金刚石相含量下降,晶面取向由(111)面转变为(220)面以及(311)面。
Polycrystalline diamond films were produced at different concentration of CH4 through bell-jar type micro-wave plasma chemical vapor deposition apparatus at low power,using H2-CH4 as source gas. The renucleation of diamond films was examined and analyzed by using scanning electron microscopy,X-ray diffraction and Raman spectroscopy. The results show that the methane concentration has a significant effect on the renucleation of diamond films. With the increase of the concentration ratio of methane(1.0%~2.5%),the renucleation ratio was increased,the grain sizes were decreased as well as the diamond phase. While the diamond film gradually tend from(111)to(220)and(311)faces growth.
出处
《真空与低温》
2016年第2期114-118,共5页
Vacuum and Cryogenics
基金
国家自然科学基金(11175137)
湖北省教育厅项目(Q20151517)
关键词
二次形核
甲烷浓度
微波等离子体
金刚石膜
renucleation
methane concentration
microwave plasma
diamond film
