气体流速对FCVA技术制备nc-ZrC/a-C:H复合膜的影响

Effect of gas flow rate on nc-ZrC/a-C:H composite films deposited by filtered cathodic vacuum arc technology

采用磁过滤阴极真空弧(FCVA)技术,室温下通入C2H2在Si(100)与304不锈钢片上制备nc-ZrC/a-C:H复合薄膜.采用XRD、Raman、XPS、SEM-EDS研究了薄膜的成分及微观结构,利用纳米力学探针和摩擦磨损仪测试薄膜的硬度及摩擦磨损性能.主要讨论了不同C2H2气体流速对复合膜成分、结构及其性能的影响,研究结果表明:C2H2气体流速由20mL·min-1增加到70mL·min-1时,薄膜中的C原子分数逐渐升高;气体流速超过70mL·min-1后,C原子分数趋于平稳(约为75%).随着气体流速的增加,薄膜硬度呈现先增后减的趋势,当气体流速为40mL·min-1时(C原子分数约为65%),制备的薄膜综合机械性能达到最佳(硬度41.49GP,摩擦因数0.25).

Composite zirconium carbide film with excellent mechanical properties was prepared on silicon and stainless steel substrates by filtered cathode vacuum arc (FCVA)technology with C2 H2 gas as precursor under room temperature.Film composition and microstructure were investigated by grazing incidence X-ray diffraction (GIXRD),X-ray photoelectron spectroscopy (XPS),scanning electron microscope-energy dispersive spectrometer (SEM-EDS)and Raman spectroscopy.Hardness and tribological properties were characterized by high resolution transmission electron microscopy (HR-TEM)and conventional mechanical probes.Effects of C2 H2 flow on composition,microstructure and mechanical properties were studied.It was found that film C content increased with increasing C2 H2 flow rate (20-70 sccm;.But C content reached a constant value of 75%when C2 H2 flow rate was> 60 sccm.Film hardness first increased then decreased with increasing C2 H2 flow rate.Nanocomposite films showed the best mechanical quality (hardness 41.49 GPa,friction coefficient 0.25) at a C2 H2 flow rate of 40 sccm (C content was about 65%).