摘要
尖端工业生产领域需要精密平台为其提供技术支持。对各国的先进直线超声波电动机驱动的精密平台的原理、性能和应用作了初步介绍,并与上海大学研制的短、小、薄超声波电动机精密平台作对比。通过分析它们的特点,为我国的直线超声波电动机驱动控制精密平台的开发研究提供建议和参考。
The precision stage provides the technical support for the sophisticated industry field. This paper makes theinitial introduction on principles, properties and application of precision stages driven by the linear ultrasonic motor, andmakes the contrast with the short, small and thin linear ultrasonic motor precision stage of Shanghai University. Through analyzing their characteristics, this paper provides reference for research and development of the linear ultrasonic motor precision stages in our county.
出处
《微特电机》
北大核心
2016年第4期71-74,共4页
Small & Special Electrical Machines
关键词
精密平台
直线超声波电动机
定位精度
precision stage
linear ultrasonic motor
positioning accuracy
