气相色谱质谱联用法测定高纯四氟化碳气体中痕量六氟乙烷和八氟丙烷

Determination of hexafluoroethane and octafluoropropane in pure tetrafluoromethane by GC/MS

建立了气相色谱质谱联用法测定高纯四氟化碳气体中六氟乙烷和八氟丙烷的方法。采用选择性离子监测(SIM)模式,分别以m/z119和m/z169作为六氟乙烷和八氟丙烷的定量离子,在(0.1~50)×10^(-6 )V/V的浓度线性范围内,待测物体积分数与响应值呈良好线性关系(R^2≥0.999),六氟乙烷和八氟丙烷的检出限均低于0.01×10^(-6 ) V/V。该方法处理简单,检测时间短,具有良好的精密度,适用于高纯四氟化碳中六氟乙烷和八氟丙烷的检测。

A method for the determination of hexafluoroethane(C_2F_6) and octafluoropropane(C_3F_8) in pure tetrafluoromethane(CF_4) was proposed by gas chromatography-mass spectrometry(GC/MS) with selection ion monitoring mode(SIM). The ions m/z=119 and m/z= 169 were chosen as quantitative ion for C_2F_6 and C_3F_8. The results show that the calibration curve has good linearity in liner range of(0.1~50)×10^(-6 ) V/V with the correlation coefficient R^2 higher than 0.999, and the limits of detection are less than 0.01×10^(-6 ) V/V. The method has the advantages of simple and rapid detection with good precision and can be applied in the quantification of C_2F_6 and C_3F_8 in CF_4.