摘要
文章简单综述了金刚石工具在光伏产业、LED和半导体等领域的应用,并介绍了单晶硅、多晶硅和蓝宝石的加工流程和加工过程中用到的金刚石工具,其中重点介绍了金刚石圆锯片、高精度钻头、金刚石线锯、超细粒度金刚石砂轮和金刚石超薄切割片,最后就国内金刚石工具的发展趋势做了简单阐述。
This article briefly reviews the application of diamond tools on photovoltaic industry,LED and semiconductor fields etc.The diamond tools used in the process flow and machining process of monocrystalline silicon,polycrystalline silicon and sapphire have also been introduced.Among them,the diamond circular saw blade,high precision drill bit,diamond wire saw,ultrafine diamond grinding wheel and ultrathin diamond cutting blade have been emphatically introduced.The development trend of domestic diamond tools has also been expounded by the end of this article.
出处
《超硬材料工程》
CAS
2016年第2期27-31,共5页
Superhard Material Engineering
关键词
单晶硅
多晶硅
蓝宝石
砂轮
线锯
monocrystalline silicon
polycrystalline silicon
sapphire
diamond grinding wheel
diamond wire saw