摘要
针对提高容栅传感器精度需要减小边缘效应问题,利用Ansoft Maxwell有限元分析软件对其电磁场模型进行仿真,通过对容栅传感器的极板间距、栅极对数、栅极厚度这3个参数进行仿真,得到对应的电容值,并对这个电容值的大小和趋向进行分析,为传感器选择最优参数提供依据。仿真结果表明:容栅传感器受边缘效应影响且影响不可忽略,通过减小极板间距和极板厚度、控制栅极对数可以减小边缘效应的影响,对于提高容栅传感器精度具有重要意义。
In view of improving the precision of capacitive grid sensor by reducing edge effect,the sensor＇s electromagnetic field model was simulated by the finite element analysis software of Ansoft Maxwell. According to simulated the three parameters of distance between grid plate,number of grid plate,and thickness of grid plate,the corresponding values of capacitance were got. And it provided the basis for selecting optimal parameters of sensor by analyzing size and trend of the values of capacitance. The results of simulation show that capacitive grid sensor is influenced by the edge effect,and this influence cannot be ignored. Therefore,by means of reducing thickness and distance of the grid plate,controlling number of grid plate,it can minimize the edge effect,the simulation is significance to achieve improving the precision of capacitive grid sensor.
出处
《仪表技术与传感器》
CSCD
北大核心
2016年第2期1-3,11,共4页
Instrument Technique and Sensor
基金
山西省回国留学人员科研资助项目(2011070)
中北大学第十一届研究生科技基金(20141153,20141155)
动态测试技术重点实验室基金(2015-2)
