用于多传感器坐标测量机探测误差评价的薄环规标准器

Thin ring gauge artifact for probing error evaluation of multi-sensor coordinate measuring machine

设计了一种薄环规标准器,用于配有光学影像测头和接触式测头的多传感器坐标测量机的探测误差评价。该标准器兼有环规和二维平面标准圆的特征,孔的有效部分厚度为0.1 mm,圆度为0.5μm,可以满足大多数坐标测量机的校准需求,避免了普通标准器如标准球、环规对影像测头测量成像的影响。该标准器同时适用于接触式测头测量,锥孔结构保证了标准器的稳定性,用于接触式测量时,不会引起变形。利用设计的薄环规标准器实现了配有光学影像测头和接触式测头组合测量系统的探测误差评价,结果表明该标准器有效解决了上述组合系统探测误差的校准问题。参照ISO10360-9标准,给出了多传感器组合测量系统的探测误差、尺寸测量误差以及位置误差,并利用坐标变换方法修正了位置误差,优化了系统参数。

A thin ring gauge artifact is designed to evaluate the probing errors of a multi-sensor Coordinate Measuring Machine （CMM） equipped with an imaging probe and a touch probe. This artifact is defined with a sharp edged hole in a metal plate. It has the features of both 2D circle and 3D ring gauge, the effective height of the hole is only 0.1 mm and the roundness is 0.5 ktm. It is suitable to measure the touch probe as well as imaging probe. As the height effect of the hole for the imaging probe is eliminated, the artifact also could be used in the touching measurement. Moreover, the designed cone structure ensures the stability of the artifact, so the deformation could not be happened when it is used in the touching measurement. The artifact is used in the evaluation of the probing errors of a combinend probing system equipped with the imaging probe and the touch probe, and the results show that the artifact has implemented the calibration of the probing errors. Finally, according to ISO 10360-9, parameters including combined size error, form error and location error are calculated and the method based on coordinate transform is applied to correction of location errors and optimization of systematic parameters.