氩气流量对(a-C:Fe)/Al_2O_3/Si异质结太阳能电池光伏效应的影响研究

Study of Effect of Argon Gas-flow on Photovoltaic Effect of(a-C:Fe)/Al_2O_3/Si Heterojunction Solar Cell

采用射频磁控溅射法在n-Si(100)衬底上依次沉积氧化铝膜(Al2O3)和铁掺杂非晶碳薄膜(aC:Fe),制成(a-C:Fe)/Al2O3/Si异质结太阳能电池,研究了氩气流量对光伏性能的影响.在20sccm到40sccm范围内调节氩气流量,结果表明,氩气流量的大小对异质结太阳能电池的光伏性能有显著的影响,合适的氩气流量能显著增大(a-C:Fe)/Al2O3/Si异质结太阳能电池的开路电压和短路电流密度,进而增大异质结太阳能电池的光电转换效率.在氩气流量为30sccm时,异质结太阳能电池光电转化效果达到最佳.随后随着氩气流量的增大,电池的开路电压与短路电流密度均大幅度减小.铁掺杂非晶碳膜(a-C:Fe)的拉曼光谱与光学带隙的分析表明,光伏效应随氩气流量变化敏感的原因源于:随着通入氩气流量的改变,铁掺杂非晶碳膜(a-C:Fe)的微观结构、光学性能发生较大的变化,进而对电池的光电转换特性造成了显著影响.

The Al2O3 films and iron doped amorphous carbon films（a-C：Fe）are deposited on n-type silicon substrates（100）using magnetron sputtering in order.The influence of argon gas-flow on photovoltaic effect on the fabricated heterojunction solar cell（a-C：Fe）/Al2O3/Si is investigated.It is found that the appropriate argon gas-flow can significantly improve the photoelectric conversion performance of solar cell by increasing the open-circuit voltage and short-current density.The best energy conversion efficiency is obtained as the argon gas-flow is 30 sccm.The open-circuit voltage and short-current density of solar cell are both largely reduced after the gas-flow exceeds the 30 sccm The Raman spectroscopic and optical band gap analysis indicates the great changes for the microstructure and optical properties of iron doped amorphous carbon are responsible for the photovoltaic effect sensibility with argon gas-flow;and then a significant effect on the energy conversion efficiency hasachieved.